Design And Fabrication Of Platinum-Based Mems Microheater With Integrated Temperature Sensor For The Thermal Analysis Of Greenhouse Gases

Abstract

Micro electromechanical system (MEMS) microheater plays a vital role in in semiconductor based chemical sensors. In this study a platinum-based MEMS microheater is designed using CleWin 4.1mask designing tool and fabricated using surface micro machining technique. To analyze the thermal activities, thedesigned platinum microheater is integrated with temperature sensor. The thermal analysis such as of rise time and fall time of heater is performed on the selected greenhouse gases CO2 and CH4using a novel research equipment Sensimer. The designed microheater along with temperature sensor successfully responded to the above-mentioned gases with different temperature with less power consumption. From the Experimental results we can infer that, that power consumption and average pulsating time constant for CO2and CH4 are 2.8mW&6ms and 3.6mW & 5ms respectively, for the temperature variation from 30°C to 400°C in the fabricated microheater. The thermal analysis of above-mention edgreen housegases causing elements to have been presented in this paper.